updated on August 30, 2024 |
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SCHOOL ON NANOTECHNOLOGIES: |
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Chairs: Vittorio MORANDI, CNR-IMM & Lorenza FERRARIO, FBK | |||||||||||
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According to the increasing request of STEM skills, the school keeps, for the sixth year, offering a great opportunity to understand how nanodevices are studied, designed, fabricated and controlled. The course is dedicated to Master degree and Ph.D students, as well as to scientists working in the wide field of micro- and nano-technology, with attention to both planar and 3D technologies. Besides the lectures dedicated to single technology steps, building blocks of the silicon-based micro- and nano-fabrication technologies, there will be sessions dedicated to devices application areas. Especially in nanoscience, where results require huge amounts of time and resources, enhance research results requires mastering data and their management. The European Community, and the EU funded projects, ask to share information according to open and standardized models in order to fasten research to innovation times. The school will offer talks on the FAIR data management paradigm, today massively diffused in the scientific community. The school is organized by It-fab (http://itfab.bo.imm.cnr.it/), the Italian network for Micro and Nano Fabrication research infrastructures. |
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Wednesday 11 September | |||||||||||
School opening | |||||||||||
09:00 - 09:15 |
Welcome and introduction Lorenza FERRARIO - CV FBK |
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09:15 - 09:45 |
PNRR Infrastructures, RIANA, ENL updates Vittorio MORANDI CNR-ISMN |
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09:45 - 10:30 | Best practices and lessons learned for managing reproducible processes in medium-sized research Clean rooms Giulia APRILE - CV INRiM |
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10:30 - 10:50 break | |||||||||||
10:50 - 11:35 | Ion Implantation - basic technologies: doping 1 Antonino PICCIOTTO - CV FBK |
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11:35 - 12:20 |
Plasma/etching 1 - basic technologies: etching 1 Ali NAWAZ - CV FBK |
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12:20 - 13:00 |
Plasma/etching 2 - basic technologies: etching 1 Ali NAWAZ - CV FBK |
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13:00 - 14:00 light lunch | |||||||||||
14:00 - 14:45 | Deposition of thin films - basic technologies: deposition 1 Riccardo BERTACCO - CV PoliMI/PoliFAB |
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14:45 - 15:30 | Deposition of thin films - basic technologies: deposition 2 Riccardo BERTACCO - CV PoliMI/PoliFAB |
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15:30 - 16:00 break | |||||||||||
16:00 - 16:45 | Hard and soft magnetic "thick" films for MEMS - applications of magnetic films Riccardo BERTACCO - CV PoliMI/PoliFAB |
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Thursday 12 September |
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Basics - PATTERN TRANSFER | |||||||||||
09:00 - 09:45 |
Lithography 1 - basic technologies: litho 1 Massimo CUSCUNÀ - CV Nanotec CNR, Lecce |
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09:45 - 10:30 |
Lithography 2 - basic technologies: litho 2 Massimo CUSCUNÀ - CV Nanotec CNR, Lecce |
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10:30 - 10:50 break | |||||||||||
10:50 - 11:35 |
Two photon polymerization for micrometric devices fabrication - basic technologies Valentina BERTANA (remotely) Polytechnic University of Turin |
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11:35 - 12:20 |
Lithography based on block copolymers - basic technologies: innovative patterning Irdi MURATAJ - CV INRIM / CNR-IMM |
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12:20 - 13:00 | Litografia per applicazioni 3D - basic technologies: litho 3 Sara NOCENTINI - CV INRiM |
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13:00 - 14:00 light lunch | |||||||||||
14:00 - 14:45 | Biosensors and Microfluidics - technological platforms Simone Luigi MARASSO PoliTo/CNR-IMEM |
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14:45 - 15:30 light lunch | |||||||||||
15:30 - 16:15 | Quantum and nanotechnologies applied to time and frequency metrology - METROLOGY - basic technologies: metrology Chiara GIONCO INRiM |
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16:15 - 17:00 | Traceable Dimensional Nanometrology by Metrologial AFM Luigi RIBOTTA - CV |
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Friday 13 September | |||||||||||
Applications | |||||||||||
09:45 - 10:30 | Fair Data, Open Data - 1: FAIR OPEN Data Management Elena GIGLIA (remotely) Polytechnic University of Turin |
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10:30 - 10:50 break | |||||||||||
10:50 - 11:35 |
Semiconductor Packaging: Overview of Main Assembly Steps and Nanotechnologies' Contribution Matteo Luca QUATTROCCHIO (remotely) - CV ST Microelectronics |
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11:35 - 12:20 | Fair Data, Open Data - 2: FAIR OPEN Data Management Francesca DE CHIARA CNR-ISMN |
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12:20 - 12:30 | DOE: an advanced application to dry etching processes Simona FIORAVANTI FBK |
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